Dedicated High Precision Wafer Thickness Measuring System
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Dedicated High Precision Wafer Thickness Measuring System |
- Features1:
- For various wafer sizes: Models are available to measure the thickness of f3, f4, f5, f6 and f12 wafers.
- Features2:
- Easy to operate: changes between different wafer sizes can be performed by simply changing the position of the stopper pin.
- Features3:
- Moire Scale Provides 0.1 µm Min. Resolution, repeatability of 0.2 µm and a highly precise cumulative indication error of ±0.15 µm
- Features4:
- The lift lever incorporates a printout command switch. This enables data to be printed as soon as measurement has been completed.
